Growth of highly (100) oriented lead zirconate titanate films on silicon and glass substrates using lanthanum nitrate as a buffer layer

被引:13
作者
Choi, JJ [1 ]
Park, CS [1 ]
Park, GT [1 ]
Kim, HE [1 ]
机构
[1] Seoul Natl Univ, Sch Mat Sci & Engn, Seoul 151742, South Korea
关键词
D O I
10.1063/1.1819519
中图分类号
O59 [应用物理学];
学科分类号
摘要
Highly oriented lead zirconate titanate [Pb(Zr,Ti)O-3; PZT] thin films were deposited on Pt/Ti/SiO2/Si and glass substrates by the sol-gel method using lanthanum nitrate as a buffer layer. When the lanthanum nitrate buffer layer was annealed at temperatures between 450 and 550 degreesC, the PZT layer coated onto this buffer layer showed strong (100) orientation. The film deposited on the buffer layer had this orientation, regardless of the other deposition conditions, such as the pyrolysis temperature, pyrolysis time, annealing temperature, and heating rate. The lanthanum nitrate buffer layer also acted as a very effective diffusion barrier against Pb-Si interdiffusion, thus allowing for the direct deposition of PZT films on Si, SiO2/Si, and glass substrates. Using this buffer layer, highly oriented PZT film was fabricated stably and reproducibly, regardless of substrate material and the coating conditions. The nature of the lanthanum nitrate buffer layer and its role in the growth of the highly (100) oriented PZT films were investigated. (C) 2004 American Institute of Physics.
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页码:4621 / 4623
页数:3
相关论文
共 16 条
[1]   ORIENTATION OF RAPID THERMALLY ANNEALED LEAD-ZIRCONATE-TITANATE THIN-FILMS ON (111) PT SUBSTRATES [J].
BROOKS, KG ;
REANEY, IM ;
KLISSURSKA, R ;
HUANG, Y ;
BURSILL, L ;
SETTER, N .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (10) :2540-2553
[2]   TEMPERATURE-TIME TEXTURE TRANSITION OF PB(ZR1-XTIX)O-3 THIN-FILMS .1. ROLE OF PB-RICH INTERMEDIATE PHASES [J].
CHEN, SY ;
CHEN, IW .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (09) :2332-2336
[3]   Orientation controlling of PZT thin films derived from sol-gel techniques [J].
Cheng, JR ;
Meng, ZY .
JOURNAL OF MATERIALS SCIENCE LETTERS, 2000, 19 (21) :1945-1949
[4]  
CHOI JJ, IN PRESS J MAT RES
[5]   PLZT ELECTROOPTIC MATERIALS AND APPLICATIONS - A REVIEW [J].
HAERTLING, GH .
FERROELECTRICS, 1987, 75 (1-2) :25-55
[6]   Highly oriented lead zirconium titanate thin films: Growth, control of texture, and its effect on dielectric properties [J].
Kalpat, S ;
Uchino, K .
JOURNAL OF APPLIED PHYSICS, 2001, 90 (06) :2703-2710
[7]   Investigation of the drying temperature dependence of the orientation in sol-gel processed PZT thin films [J].
Kim, CJ ;
Yoon, DS ;
Jiang, ZT ;
No, K .
JOURNAL OF MATERIALS SCIENCE, 1997, 32 (05) :1213-1219
[8]   LOW-TEMPERATURE PEROVSKITE FORMATION OF LEAD ZIRCONATE TITANATE THIN-FILMS BY A SEEDING PROCESS [J].
KWOK, CK ;
DESU, SB .
JOURNAL OF MATERIALS RESEARCH, 1993, 8 (02) :339-344
[9]   Effects of seeding layer on perovskite transformation, microstructure and transmittance of sol-gel-processed lanthanum-modified lead zirconate titanate films [J].
Lee, Joon Sung ;
Kim, Chang Jung ;
Yoon, Dae Sung ;
Choi, Chaun Gi ;
Kim, Jae Myung ;
No, Kwangsoo .
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1994, 33 (1 A) :260-265
[10]   Thermal genesis course and characterization of lanthanum oxide [J].
Mekhemer, GAH ;
Balboul, BAA .
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2001, 181 (1-3) :19-29