Towards new precursors for ZnO thin films by single source CVD: the X-ray structures and precursor properties of zinc ketoacidoximates

被引：27

作者：

Hill, MR ^{[1
]}

Jones, AW ^{[1
]}

Russell, JJ ^{[1
]}

Roberts, NK ^{[1
]}

Lamb, RN ^{[1
]}

机构：

[1] Univ New S Wales, Sch Chem Surface Sci & Technol, Sydney, NSW 2052, Australia

来源：

INORGANICA CHIMICA ACTA | 2005年 / 358卷 / 01期

关键词：

D O I：

10.1016/j.ica.2004.07.022

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

Zinc complexes of pyruvic and glyoxylic acid oximes have been investigated as potential precursors for single source chemical vapour deposition (SSCVD) of ZnO thin films. The X-ray crystal structures of the complexes and of their NOW analogues reveal markedly different coordination and intermolecular bonding patterns. These structural differences, in conjunction with ligand substituent changes impart different responses to thermogravimetric analysis (TGA), and sublimation. The glyoxylic acid methyloxime Zn(O2CCHN(OMe))(2) . 2H(2)O has volatility and thermolysis properties suitable for SSCVD of ZnO. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：201 / 206

页数：6

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