PZT thin films for microsensors and actuators: Where do we stand?

被引：312

作者：

Muralt, P ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2000年 / 47卷 / 04期

关键词：

D O I：

10.1109/58.852073

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.

引用

页码：903 / 915

页数：13

共 117 条

[1]

Al-Shareef H. N., 1993, Integrated Ferroelectrics, V3, P321, DOI 10.1080/10584589308216687

[2]

Alexander TP, 1996, ISAF '96 - PROCEEDINGS OF THE TENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, P585, DOI 10.1109/ISAF.1996.598048

[3]

[Anonymous], 1996, FUNDAMENTALS PIEZOEL

[4] EFFECTS OF TITANIUM BUFFER LAYER ON LEAD-ZIRCONATE-TITANATE CRYSTALLIZATION PROCESSES IN SOL-GEL DEPOSITION TECHNIQUE [J].

AOKI, K ;

FUKUDA, Y ;

NUMATA, K ;

NISHIMURA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (01) :192-195

[5] MICROSTRUCTURE AND DOMAIN EFFECTS IN FERROELECTRIC CERAMICS [J].

ARLT, G .

FERROELECTRICS, 1989, 91 :3-7

[6] DIELECTRIC-PROPERTIES OF FINE-GRAINED BARIUM-TITANATE CERAMICS [J].

ARLT, G ;

HENNINGS, D ;

DEWITH, G .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) :1619-1625

[7]

AULD BA, 1973, ACOUSTIC FIELD WAVES, V1

[8] A THIN-FILM PYROELECTRIC DETECTOR [J].

BELL, A ;

HUANG, Y ;

PAUL, O ;

NEMIROVSKY, Y ;

SETTER, N .

INTEGRATED FERROELECTRICS, 1995, 6 (1-4) :231-240

[9]

BERATAN HR, 1998, INT S INT FERR

[10]

BERLINCOURT DA, 1960, PIEZOELECTRIC PROPER

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