Characterization of oxide traps in 0.15 μm2 MOSFETs using random telegraph signals

Random telegraph signals (RTS) have been used to characterize oxide traps of W x L = 0.97 x 0.15 mum(2) medium-doped drain n-MOSFETs. RTS have been measured in the linear and saturation regions of operation, both in forward and reverse modes where the drain and source are reversed. The contribution of mobility fluctuations as well as number fluctuations to the amplitude of RTS has been investigated. The scattering coefficient due to screened Coulomb scattering effect is computed from the measured data as a function of channel carrier density. The depth of the position of the trap in the oxide from Si-SiO2 interface is calculated utilizing the dependence of the emission and capture times on the gate voltage. In addition, the position of the trap along the channel with respect to the source is obtained using the difference in the drain voltage dependence of the capture and emission times between the forward and reverse modes. Knowing the location of the trap in the oxide and along the channel, the energy associated with the trap can be extracted accurately from the data. This technique allows one to evaluate the trap energy at the point where the trap is located without any assumptions about the location of the trap or the need for variable temperature measurements. The probed trap was found to be an acceptor type center (repulsive for an n-MOSFET) located at about 27 Angstrom deep the oxide, half-way between drain and source with an energy of E-Cox - E-T = 3.04 eV, slightly above the conduction band edge. (C) 2000 Elsevier Science Ltd. All rights reserved.