An electroformed CMOS integrated angular rate sensor

被引：22

作者：

Chang, S

Chia, M

Castillo-Borelley, P

Higdon, W

Jiang, Q

Johnson, J

Obedier, L

Putty, M

Shi, Q

Sparks, D

Zarabadi, S

机构：

[1] Delphi Delco Elect Syst, Kokomo, IN 46904 USA

[2] GM Corp, Res Ctr, Warren, MI 48090 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期

关键词：

angular rate sensors; electroforming; yaw; CMOS; gyroscopes; LIGA;

D O I：

10.1016/S0924-4247(97)01761-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A CMOS integrated, surface-micromachined angular rate sensor utilizing an electroformed vibrating metal ring structure on a silicon IC has been developed. Substantial signal-conditioning circuitry is included on the IC with the vibrating structure. Tests of the sensor demonstrate that its performance is equivalent to that required for a variety of angular rate applications. Stiction of electroformed micromachines and other reliability issues will be discussed. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：138 / 143

页数：6

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