Modification of micro-cantilever sensors with sol-gels to enhance performance and immobilize chemically selective phases

A chemical sensor based on the deflection of a surface modified silicon micro-cantilever is presented. A thin film of sol-gel was applied to one side of the micro-cantilever surface using a spin coating procedure. The sensor has been shown to give different responses to vapor phase analytes of varying chemical composition, as well as to varying concentrations of a given analyte. Ethanol, a highly polar molecule, exhibits a strong affinity for the polar sol-gel coating resulting in a large response; pentane, a non-polar hydrocarbon, shows very little response. The sol-gel coating has also been shown to function as a backbone for the immobilization of chemically selective phases on the cantilever surface. Reaction of the sol-gel him with chlorotriethoxysilane and subsequent capping of the remaining reactive surface silanols with hexamethyldisilizane increases the non-polar nature of the film. This results in an increase in the response of the sensor to non-polar analytes. The effects of film thickness and cantilever structure thickness on response were also investigated. (C) 2000 Elsevier Science B.V. All rights reserved.