Modification of micro-cantilever sensors with sol-gels to enhance performance and immobilize chemically selective phases

被引:36
作者
Fagan, BC
Tipple, CA
Xue, ZL
Sepaniak, MJ [1 ]
Datskos, PG
机构
[1] Univ Tennessee, Dept Chem, Knoxville, TN 37919 USA
[2] Oak Ridge Natl Lab, Engn Technol Div, Oak Ridge, TN 37831 USA
基金
美国国家科学基金会;
关键词
micro-cantilever sensors; sol-gels; chemically selective phases;
D O I
10.1016/S0039-9140(00)00533-6
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A chemical sensor based on the deflection of a surface modified silicon micro-cantilever is presented. A thin film of sol-gel was applied to one side of the micro-cantilever surface using a spin coating procedure. The sensor has been shown to give different responses to vapor phase analytes of varying chemical composition, as well as to varying concentrations of a given analyte. Ethanol, a highly polar molecule, exhibits a strong affinity for the polar sol-gel coating resulting in a large response; pentane, a non-polar hydrocarbon, shows very little response. The sol-gel coating has also been shown to function as a backbone for the immobilization of chemically selective phases on the cantilever surface. Reaction of the sol-gel him with chlorotriethoxysilane and subsequent capping of the remaining reactive surface silanols with hexamethyldisilizane increases the non-polar nature of the film. This results in an increase in the response of the sensor to non-polar analytes. The effects of film thickness and cantilever structure thickness on response were also investigated. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:599 / 608
页数:10
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