Electrochemical micromachining of controlled topographies on titanium for biological applications

被引:68
作者
Madore, C [1 ]
Landolt, D [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Dept Mat, Lab Met Chim, CH-1015 Lausanne, Switzerland
关键词
D O I
10.1088/0960-1317/7/4/002
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Well defined three-dimensional structures on titanium were fabricated by electrochemical micromachining. An optimum electrolyte composition and electrochemical parameters were determined for obtaining controlled cavity shapes and a smooth surface finish. Using a methanol based electrolyte, mass transport controlled dissolution conditions were identified and subsequently applied to the fabrication of arrays of hemispherical cavities 30 mu m in diameter. The results of the present study demonstrate the feasibility of using through-mask electrochemical etching for producing high-precision topographies on titanium.
引用
收藏
页码:270 / 275
页数:6
相关论文
共 17 条
[1]   ELECTROCHEMICAL MACHINING OF SOME TITANIUM-ALLOYS IN BROMIDE ELECTROLYTES [J].
BANNARD, J .
JOURNAL OF APPLIED ELECTROCHEMISTRY, 1976, 6 (06) :477-483
[2]   PITTING OF TITANIUM .1. TITANIUM-FOIL EXPERIMENTS [J].
BECK, TR .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) :1310-1316
[3]   PITTING OF TITANIUM .2. ONE-DIMENSIONAL PIT EXPERIMENTS [J].
BECK, TR .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) :1317-1324
[4]   CELL BEHAVIOR ON MICROPATTERNED SURFACES [J].
CLARK, P .
BIOSENSORS & BIOELECTRONICS, 1994, 9 (9-10) :657-661
[5]  
CURTIS ASG, 1990, CRIT REV BIOCOMPAT, V5, P343
[6]   APPLICATION OF CHEMICAL AND ELECTROCHEMICAL MICROMACHINING IN THE ELECTRONICS INDUSTRY [J].
DATTA, M ;
ROMANKIW, LT .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (06) :C285-C292
[7]   FABRICATION OF AN ARRAY OF PRECISION NOZZLES BY THROUGH-MASK ELECTROCHEMICAL MICROMACHINING [J].
DATTA, M .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (11) :3801-3805
[8]  
LANDOLT D, 1994, P S EL EL MICR, P141
[9]  
LANDOLT D, 1995, P S HIGH RAT MET DIS, P3
[10]  
MATHIEU JB, 1979, OBERFLACHE SURFACE, V20