APPLICATION OF CHEMICAL AND ELECTROCHEMICAL MICROMACHINING IN THE ELECTRONICS INDUSTRY

被引：62

作者：

DATTA, M

ROMANKIW, LT

机构：

来源：

关键词：

D O I：

10.1149/1.2097055

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C285 / C292

页数：8

共 84 条

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