APPLICATION OF CHEMICAL AND ELECTROCHEMICAL MICROMACHINING IN THE ELECTRONICS INDUSTRY

被引:62
作者
DATTA, M
ROMANKIW, LT
机构
关键词
D O I
10.1149/1.2097055
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:C285 / C292
页数:8
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