BEVELING ALUMINUM IN MULTILAYER METAL CIRCUITRY

被引：4

作者：

AGATSUMA, T ^{[1
]}

KIKUCHI, A ^{[1
]}

NAKADA, K ^{[1
]}

TOMOZAWA, A ^{[1
]}

机构：

[1] HITACHI LTD,SEMICOND & INTEGRATED CIRCUITS DIV,KODAIRA,TOKYO,JAPAN

来源：

关键词：

D O I：

10.1149/1.2134332

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：825 / 829

页数：5

共 11 条

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KELLER, F
HUNTER, MS
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[4] KERN W, 1973, 11TH ANN P REL PHYS, P214
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[6] NABER CT, 1972, J ELECTROCHEM SOC, V119, pC301
[7] NAGAYAMA M, 1968, DENKI KAGUKU, V36, P34
[8] NAKANE H, COMMUNICATION
[9] MORPHOLOGY AND MECHANISM OF FORMATION OF POROUS ANODIC FILMS ON ALUMINIUM
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WOOD, GC
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1970, 317 (1531) : 511 - +
[10] SCHNABLE GL, 1971, ADV ELECTRON, V30, P79