Fabrication of surface relief gratings on lithium niobate by combined UV laser and wet etching

被引:14
作者
Mailis, S [1 ]
Ross, GW [1 ]
Reekie, L [1 ]
Abernethy, JA [1 ]
Eason, RW [1 ]
机构
[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England
关键词
D O I
10.1049/el:20001262
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Surface relief gratings have been fabricated on pure and Ti indiffused lithium niobate samples of x-cut and z-cut crystallographic orientations by a simple two-step process, which combines optical (pulsed ultra-violet laser) and chemical etching.
引用
收藏
页码:1801 / 1803
页数:3
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