Generation of submicron surface gratings on LiNbO3 by ultrashort UV laser pulses

被引：38

作者：

Chen, K ^{[1
]}

Ihlemann, J ^{[1
]}

Simon, P ^{[1
]}

Baumann, I ^{[1
]}

Sohler, W ^{[1
]}

机构：

[1] UNIV GESAMTHSCH PADERBORN,ANGEW PHYS,D-33095 PADERBORN,GERMANY

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1997年 / 65卷 / 4-5期

关键词：

D O I：

10.1007/s003390050617

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ablation of submicron surface structures on LiNbO3 by short ultraviolet laser pulses (0.5 ps, 248 nm) is presented. Gratings with a period of 360 nm and a modulation depth of 80 nm are fabricated on the sample surface by single-laser-shot exposure. The structures are projection imaged by a Schwarzschild objective in air. The modulation depth can be varied by applying multiple-pulse exposure.

引用

页码：517 / 518

页数：2

共 11 条

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