共 17 条
- [1] BIXLER JV, 1991, P SOC PHOTO-OPT INS, V1549, P420, DOI 10.1117/12.48358
- [2] CIARLO DR, 1986, P SOC PHOTO-OPT INS, V688, P163
- [3] Analysis of distortion in interferometric lithography [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4009 - 4013
- [4] Franke A. E., 1997, THESIS MIT
- [6] HUNTER WR, 1985, SPECTROMETRIC TECHNI, V4, P63
- [7] KAHN SD, UNPUB
- [8] KAHN SM, 1990, IAU C, V115, P365
- [9] EFFICIENCY MEASUREMENTS OF REFLECTION GRATINGS IN THE 100-300-A BAND [J]. APPLIED OPTICS, 1989, 28 (07): : 1369 - 1377
- [10] PAERELS FBS, COMMUNICATION