Low-loss superconducting resonant circuits using vacuum-gap-based microwave components

被引：55

作者：

Cicak, Katarina ^{[1
]}

Li, Dale ^{[1
]}

Strong, Joshua A. ^{[1
,2
]}

Allman, Michael S. ^{[1
,2
]}

Altomare, Fabio ^{[1
]}

Sirois, Adam J. ^{[1
,2
]}

Whittaker, Jed D. ^{[1
,2
]}

Teufel, John D. ^{[1
]}

Simmonds, Raymond W. ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Boulder, CO 80305 USA

[2] Univ Colorado, Boulder, CO 80309 USA

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 09期

关键词：

capacitors; gravimeters; inductors; microwave circuits; superconducting resonators;

D O I：

10.1063/1.3304168

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have produced high-quality complex microwave circuits, such as multiplexed resonators and superconducting phase qubits, using a "vacuum-gap" technology that eliminates lossy dielectric materials. We have improved our design and fabrication strategy beyond our earlier work, leading to increased yield, enabling the realization of these complex circuits. We incorporate both novel vacuum-gap wiring crossovers for gradiometric inductors and vacuum-gap capacitors (VGC) on chip to produce resonant circuits that have large internal quality factors (30 000 < Q(I)< 165 000) at 50 mK, outperforming most dielectric-filled devices. Resonators with VGCs as large as 180 pF confirm single mode behavior of our lumped-element components.

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页数：3

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