Determination of surface polarity of c-axis oriented ZnO films by coaxial impact-collision ion scattering spectroscopy

被引:141
作者
Ohnishi, T
Ohtomo, A
Kawasaki, M
Takahashi, K
Yoshimoto, M
Koinuma, H
机构
[1] Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 226, Japan
[2] Tokyo Inst Technol, Dept Innovat & Engn Mat, Midori Ku, Yokohama, Kanagawa 226, Japan
关键词
D O I
10.1063/1.120905
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have identified the surface polar structure of wurtzite-type ZnO films by coaxial impact-collision ion scattering spectroscopy. High-quality ZnO epitaxial films were prepared on sapphire (alpha-Al2O3) (0001) substrates by laser molecular beam epitaxy using a ZnO ceramic target. The (000 (1) over bar) crystallographic plane (the O face) was found to terminate the top surface of the ZnO film by comparing spectra of the films with those of well-defined (0001) and (000 (1) over bar) surfaces of bulk single crystals. The preferential [000 (1) over bar] growth direction of ZnO films is discussed from the viewpoints of the chemical interaction at the interface and surface stability against sublimation. (C) 1998 American Institute of Physics.
引用
收藏
页码:824 / 826
页数:3
相关论文
共 15 条
[1]   A SURFACE-COMPOSITION STUDY OF SULFIDED COBALT MOLYBDENUM CATALYSTS BY LOW-ENERGY ION-SCATTERING SPECTROMETRY (ISS) [J].
BEUKEN, JM ;
BERTRAND, P .
SURFACE SCIENCE, 1985, 162 (1-3) :329-336
[2]  
Buck T.M., 1975, METHODS SURFACE ANAL, P75
[3]   Polarity determination of GaN films by ion channeling and convergent beam electron diffraction [J].
Daudin, B ;
Rouviere, JL ;
Arlery, M .
APPLIED PHYSICS LETTERS, 1996, 69 (17) :2480-2482
[4]   STRUCTURE OF THE ZNO (000(1)OVER-BAR) SURFACE STUDIED BY X-RAY PHOTOELECTRON DIFFRACTION [J].
GALEOTTI, M ;
ATREI, A ;
BARDI, U ;
ROVIDA, G ;
TORRINI, M ;
ZANAZZI, E ;
SANTUCCI, A ;
KLIMOV, A .
CHEMICAL PHYSICS LETTERS, 1994, 222 (04) :349-352
[5]   EXPLANATION OF 6-FOLD LEED PATTERNS FROM POLAR (0001) AND (0001) ZNO SURFACES [J].
HENRICH, VE ;
ZEIGER, HJ ;
SOLOMON, EI ;
GAY, RR .
SURFACE SCIENCE, 1978, 74 (03) :682-683
[6]   SEPARATION OF SCATTERED IONS AND NEUTRALS IN CAICISS WITH AN ACCELERATION TUBE [J].
KAMIYA, I ;
KATAYAMA, M ;
NOMURA, E ;
AONO, M .
SURFACE SCIENCE, 1991, 242 (1-3) :404-409
[7]   COAXIAL IMPACT-COLLISION ION-SCATTERING SPECTROSCOPY (CAICISS) - A NOVEL METHOD FOR SURFACE-STRUCTURE ANALYSIS [J].
KATAYAMA, M ;
NOMURA, E ;
KANEKAMA, N ;
SOEJIMA, H ;
AONO, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) :857-861
[8]   ATOMIC CONTROL OF THE SRTIO3 CRYSTAL-SURFACE [J].
KAWASAKI, M ;
TAKAHASHI, K ;
MAEDA, T ;
TSUCHIYA, R ;
SHINOHARA, M ;
ISHIYAMA, O ;
YONEZAWA, T ;
YOSHIMOTO, M ;
KOINUMA, H .
SCIENCE, 1994, 266 (5190) :1540-1542
[9]   LOW-TEMPERATURE SUBLIMATION PROCESSES FROM CLEAN CLEAVED POLAR SURFACES OF ZINC-OXIDE CRYSTALS DURING FIRST HEATING [J].
KOHL, D ;
HENZLER, M ;
HEILAND, G .
SURFACE SCIENCE, 1974, 41 (02) :403-411
[10]   CRYSTALLOGRAPHIC POLARITY OF ZNO CRYSTALS [J].
MARIANO, AN ;
HANNEMAN, RE .
JOURNAL OF APPLIED PHYSICS, 1963, 34 (02) :384-&