Influence of undercooling on solid/liquid interface morphology in semiconductors

被引:94
作者
Aoyama, T [1 ]
Kuribayashi, K [1 ]
机构
[1] Inst Space & Astronaut Sci, Sagamihara, Kanagawa 2298510, Japan
关键词
rapid solidification; semiconductors; undercooling;
D O I
10.1016/S1359-6454(00)00164-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Highly pure Si and Ge were undercooled by an electromagnetic levitator combined with a laser heating unit. Their crystal growth velocities were measured as a function of undercooling and the appearance of the solid/liquid interface was observed by means of a high-speed camera. The result was compared with the predicted value based on the dendrite growth theory. The growth behavior of Si was found to be classified into three categories of lateral growth, isolated dendrite growth and closer dendrite growth at low, moderate and high undcrcooling values, respectively. The first transition in the classification was caused by a change in the growth mechanism From stepwise growth in a single plane to that in multiple planes. The second transition was observed as a flattening of the macroscopic appearance of the interface. The transition undercoolings fur the classifications were 100 and 210 K for Si, and 85 and 170 K for Ge. (C) 2000 Acta Metallurgica Inc. Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:3739 / 3744
页数:6
相关论文
共 14 条
[1]  
[Anonymous], 1988, RAPID SOLIDIFICATION
[2]   Dendrite growth processes of silicon and germanium from highly undercooled melts [J].
Aoyama, T ;
Takamura, Y ;
Kuribayashi, K .
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1999, 30 (05) :1333-1339
[3]   Containerless solidification of Si-Ge binary alloy by means of laser heating electromagnetic levitation [J].
Aoyama, T ;
Takamura, Y ;
Kuribayashi, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1998, 37 (6A) :L687-L690
[4]   Authors' reply: "Emissivity change and adiabatically solidified structure during rapid solidification in semiconductor" [J].
Aoyama, T ;
Takamura, Y ;
Kuribayashi, K .
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1999, 30 (11) :3013-3016
[5]   Growth velocity-undercooling relationships and microstructural evolution in undercooled Ge and dilute Ge-Fe alloys [J].
Battersby, SE ;
Cochrane, RF ;
Mullis, AM .
JOURNAL OF MATERIALS SCIENCE, 1999, 34 (09) :2049-2056
[6]   DENDRITE GROWTH VELOCITY IN UNDERCOOLED NICKEL MELTS [J].
COLLIGAN, GA ;
BAYLES, BJ .
ACTA METALLURGICA, 1962, 10 (SEP) :895-&
[7]   MICROSTRUCTURES OF UNDERCOOLED GERMANIUM DROPLETS [J].
DEVAUD, G ;
TURNBULL, D .
ACTA METALLURGICA, 1987, 35 (03) :765-769
[8]  
Karma A, 1998, INT J NON-EQUILIB PR, V11, P201
[9]   ON THE DENDRITES AND DENDRITIC TRANSITIONS IN UNDERCOOLED GERMANIUM [J].
LAU, CF ;
KUI, HW .
ACTA METALLURGICA ET MATERIALIA, 1993, 41 (07) :1999-2005
[10]   ON THE GROWTH OF (110) TWIN DENDRITES IN UNDERCOOLED GE [J].
LAU, CF ;
KUI, HW .
ACTA METALLURGICA ET MATERIALIA, 1994, 42 (11) :3811-3816