The effect of NiAl intermediate layer on structural and magnetic properties of L1(0) FePt films with perpendicular anisotropy has been investigated. It is found that the crystallographic (001) texture of face-centered tetragonal-FePt films is improved after introducing a NiAl intermediate layer. The degree of the ordering and the coercivity of the fct-FePt films increase with NiAl intermediate layer thickness. The improvement of the crystallographic texture and magnetic properties may be attributed to the effective suppression of Cr diffusion from the underlayer. The grain size of FePt films with 4 nm of NiAl intermediate layer is about half of that of FePt film without NiAl intermediate layer. (C) 2003 American Institute of Physics.