The properties of BCN films formed by ion beam assisted deposition

被引：20

作者：

Yasui, H

Hirose, Y

Awazu, K

Iwaki, M

机构：

[1] Kanazawa Univ, Kanazawa, Ishikawa 9201192, Japan

[2] Ind Res Inst Ishikawa, Kanazawa, Ishikawa 9200223, Japan

[3] RIKEN, Wako, Saitama 3510198, Japan

来源：

COLLOIDS AND SURFACES B-BIOINTERFACES | 2000年 / 19卷 / 03期

关键词：

BCN film; IBAD; hardness; friction coefficient;

D O I：

10.1016/S0927-7765(00)00168-5

中图分类号：

Q6 [生物物理学];

学科分类号：

071011 ;

摘要：

A study has been made on the formation and the properties of boron carbonnitride (BCN) thin films. The BCN films were produced by ion beam assisted deposition, in which boron and carbon were deposited by electron beam heating and nitrogen was supplied by ion implantation simultaneously. The mechanical properties of BCN films were measured using a ultra micro hardness tester and a friction tester. The atomic ratio and the structure of BCN thin films were estimated by means of X-ray photoelectron spectroscopy, laser Raman spectroscopy and Fourier transform infrared spectroscopy. As preliminary results, it was found that the BCN films are higher in hardness and lower in friction coefficient than diamond-like carbon (DLC) films. The mechanical properties are discussed with the relation of surface composition and structure. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：291 / 295

页数：5

共 5 条

[1] EFFECTS OF ION-BEAM BOMBARDMENT OF CARBON THIN-FILMS DEPOSITED ONTO TUNGSTEN CARBIDE AND TOOL STEELS [J].