Tribological investigations on micromachined silicon sliders

被引:16
作者
Gatzen, HH [1 ]
Beck, M [1 ]
机构
[1] Inst Microtechnol, D-30167 Hannover, Germany
关键词
microfriction; tribological properties; pin-on-disk tests of silicon on DLC;
D O I
10.1016/S0301-679X(02)00198-6
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
The continuous decrease in flying height and subsequent machining challenges spurred an interest in alternative slider materials, particularly single phase ones. Furthermore, due to a desire of the recording head industry to more closely follow semiconductor fabrication technologies, silicon has been taken into consideration as an interesting alternative to alumina-titanium carbide (Altic), used presently. In case silicon is to be introduced, extensive tribological investigations are required. This paper attempts to shed some light on some basic tribological properties of silicon sliders used on DLC coated metal disks by doing a pin-on-disk test at a low rotational velocity. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:279 / 283
页数:5
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