Estimation of front velocity in electrodeposition onto highly resistive substrates

被引:8
作者
Desprez, P [1 ]
Matlosz, M
Yang, JDL
West, AC
机构
[1] INPL, CNRS, Grp ENSIC, Lab Sci Genie Chim, F-54001 Nancy, France
[2] Columbia Univ, Dept Chem Engn, New York, NY 10027 USA
关键词
D O I
10.1149/1.1838230
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The primary current distribution for electrodeposition onto a surface composed of a perfectly conducting section and. a highly resistive section is examined, both by direct numerical calculation and by singular-perturbation analysis. Results of the study show how the current density and the region over which electrodeposition reactions are appreciable scale with the conductivity and thickness of the resistive section of the electrode. The perturbation analysis leads to an approximate expression (Eq. 34 in text) for the front velocity of a growing metallic film, a result which is of practical interest for design estimates of the speed of coverage in metallization processes on resistive substrates.
引用
收藏
页码:165 / 171
页数:7
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