InGaAsP thin-film microdisk resonators fabricated by polymer wafer bonding for wavelength add-drop filters

被引：19

作者：

Ma, Y ^{[1
]}

Chang, G ^{[1
]}

Park, S ^{[1
]}

Wang, LW ^{[1
]}

Ho, ST ^{[1
]}

机构：

[1] Northwestern Univ, Inst Technol, Dept Elect & Comp Engn, Evanston, IL 60208 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2000年 / 12卷 / 11期

基金：

美国国家科学基金会;

关键词：

benzocyclobutene; InGaAsP; microdisk; polymer wafer bonding; wavelength add-drop filters;

D O I：

10.1109/68.887713

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

10-mum-diameter InGaAsP thin-film microdisk resonators have been fabricated using polymer-wafer bonding with benzocyclobutene, This wafer bonding process is to provide strong two-dimensional mode confinement in the waveguide and reduce the optical propagation loss. The measured resonance linewidth at wavelength 1.55 mum is about 0.22 nm with a free-spectral range of 20 nm, The narrow linewidth and large free-spectral range make these devices conducive to the applications in dense wavelength division multiplexed systems.

引用

页码：1495 / 1497

页数：3

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