Ultra-compact Si-SiO2 microring resonator optical channel dropping filters

被引:524
作者
Little, BE [1 ]
Foresi, JS
Steinmeyer, G
Thoen, ER
Chu, ST
Haus, HA
Ippen, EP
Kimerling, LC
Greene, W
机构
[1] MIT, Elect Res Lab, Cambridge, MA 02139 USA
[2] Univ Maryland, Dept Elect Engn, College Pk, MD 20740 USA
[3] MIT, Dept Mat Sci, Cambridge, MA 02139 USA
[4] Kanagawa Acad Sci & Technol, Kawasaki, Kanagawa 213, Japan
[5] Hewlett Packard Corp, ULSI Res Lab, Palo Alto, CA 94303 USA
关键词
microcavity; optical wavelength filter; resonator; wavelength-division multiplexing (WDM);
D O I
10.1109/68.662590
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Compact optical channel dropping filters incorporating side-coupled ring resonators as small as 3 mu m in radius are realized in silicon technology. Quality factors up to 250, and a free-spectral range (FSR) as large as 24 nm are measured. Such structures can be used as fundamental building blocks in more sophisticated optical signal processing devices.
引用
收藏
页码:549 / 551
页数:3
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