Coupled photonic crystal heterostructure nanocavities

被引:65
作者
O'Brien, D. [1 ]
Settle, M. D.
Karle, T.
Michaeli, A.
Salib, M.
Krauss, T. F.
机构
[1] Univ St Andrews, Dept Phys & Astron, St Andrews KY16 9SS, Fife, Scotland
[2] Intel Corp, IL-82109 Kyriat Gat, Israel
[3] Intel Corp, Santa Clara, CA 95054 USA
来源
OPTICS EXPRESS | 2007年 / 15卷 / 03期
关键词
D O I
10.1364/OE.15.001228
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We show the first experimental demonstration of multiple heterostructure photonic crystal cavities being coupled together to form a chain of coupled resonators with up to ten cavities. This system allows us to engineer the group velocity of light over a wide range. Devices were fabricated using 193 nm deep UV lithography and standard silicon processing technology. Structures were analysed using both coupled resonator and photonic bandstructure theory, and we highlight the discrepancies arising from subtle imperfections of the fabricated structure. (c) 2007 Optical Society of America.
引用
收藏
页码:1228 / 1233
页数:6
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