Heating mode transition induced by a magnetic field in a capacitive rf discharge

被引：87

作者：

Turner, MM

Hutchinson, DAW

Doyle, RA

Hopkins, MB

机构：

[1] School of Physical Sciences, Dublin City University, Dublin

来源：

PHYSICAL REVIEW LETTERS | 1996年 / 76卷 / 12期

关键词：

D O I：

10.1103/PhysRevLett.76.2069

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We show that a recently proposed pressure model of collisionless heating in capacitive rf discharges predicts that a small magnetic field (similar to 10 G) applied transverse to the electric field will induce a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state. This prediction is confirmed by kinetic simulations and experiments.

引用

收藏

页码：2069 / 2072

页数：4

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