ANALYTICAL SOLUTION FOR CAPACITIVE RF SHEATH

被引：506

作者：

LIEBERMAN, MA ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

关键词：

D O I：

10.1109/27.16552

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Plasmas

引用

页码：638 / 644

页数：7

共 15 条

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OX, SN
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