Atomic force microscopy observations of successive damaging mechanisms of thin films on substrates under tensile stress

被引:19
作者
George, M [1 ]
Coupeau, C [1 ]
Colin, J [1 ]
Grilhé, J [1 ]
机构
[1] Univ Poitiers, CNRS, UMR 6630, Met Phys Lab, F-86962 Futuroscope, France
关键词
thin films; atomic force microscopy; mechanical properties; tensile testing;
D O I
10.1016/S0040-6090(03)00066-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Atomic force microscopy has been used to characterize the evolution of cracks in a 100 ran thick nickel film on a polyimide substrate under increasing tensile stresses. Successive damaging mechanisms are described and discussed by means of finite element calculations. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:267 / 272
页数:6
相关论文
共 27 条
[1]   Ab initio dynamics of rapid fracture [J].
Abraham, FF ;
Brodbeck, D ;
Rudge, WE ;
Broughton, JQ ;
Schneider, D ;
Land, B ;
Lifka, D ;
Gerner, J ;
Rosenkrantz, M ;
Skovira, J ;
Gao, H .
MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING, 1998, 6 (05) :639-670
[2]  
Amer MS, 1999, J RAMAN SPECTROSC, V30, P919, DOI 10.1002/(SICI)1097-4555(199910)30:10<919::AID-JRS486>3.0.CO
[3]  
2-V
[4]   Stability of straight delamination blisters [J].
Audoly, B .
PHYSICAL REVIEW LETTERS, 1999, 83 (20) :4124-4127
[5]   CRACKING OF THIN BONDED FILMS IN RESIDUAL TENSION [J].
BEUTH, JL .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1992, 29 (13) :1657-1675
[6]   Cracking of thin films bonded to elastic-plastic substrates [J].
Beuth, JL ;
Klingbeil, NW .
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 1996, 44 (09) :1411-1428
[7]   Analysis of the mechanical response of film on substrate systems presenting rough interfaces [J].
Bordet, H ;
Ignat, M ;
Dupeux, M .
THIN SOLID FILMS, 1998, 315 (1-2) :207-213
[8]  
BOUBEKER B, 2000, MATER CHARACT, V45, P181
[9]   Determination of elastic modulus and Poisson's ratio of diamond-like carbon films [J].
Cho, SJ ;
Lee, KR ;
Eun, KY ;
Hahn, JH ;
Ko, DH .
THIN SOLID FILMS, 1999, 341 (1-2) :207-210
[10]   Biaxial elastic modulus of very thin diamond-like carbon (DLC) films [J].
Chung, JW ;
Lee, CS ;
Ko, DH ;
Han, JH ;
Eun, KY ;
Lee, KR .
DIAMOND AND RELATED MATERIALS, 2001, 10 (11) :2069-2074