MSTAR: a submicrometer, absolute metrology system

被引：72

作者：

Lay, OP

Dubovitsky, S

Peters, RD

Burger, JP

Ahn, SW

Steier, WH

Fetterman, HR

Chang, Y

机构：

[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA

[2] Univ So Calif, Dept Elect Engn, Los Angeles, CA 90089 USA

[3] Pacific Wave Ind, Los Angeles, CA 90025 USA

来源：

OPTICS LETTERS | 2003年 / 28卷 / 11期

关键词：

D O I：

10.1364/OL.28.000890

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The Modulation Sideband Technology for Absolute Ranging (MSTAR) sensor permits absolute distance measurement with subnanometer accuracy, an improvement of 4 orders of magnitude over current techniques. The system uses fast phase modulators to resolve the integer cycle ambiguity of standard interferometers. The concept is described and demonstrated over target distances up to 1 in. The design can be extended to kilometer-scale separations. (C) 2003 Optical Society of America.

引用

页码：890 / 892

页数：3

共 9 条

[1] RECENT ADVANCES IN DISPLACEMENT MEASURING INTERFEROMETRY [J].