Imperfection-sensitive ductility of aluminium thin films

被引：37

作者：

Coulombier, M. ^{[1
,2
]}

Boe, A. ^{[1
,3
]}

Brugger, C. ^{[1
,2
]}

Raskin, J. P. ^{[1
]}

Pardoen, T. ^{[1
,2
]}

机构：

[1] Catholic Univ Louvain, Res Ctr Micro & Nanoscop Mat & Elect Devices CeRM, B-1348 Louvain, Belgium

[2] Catholic Univ Louvain, Inst Mech Mat & Civil Engn iMMC, B-1348 Louvain, Belgium

[3] Univ Lille, CNRS, IRCICA, IEMN UMR 8520,FR 3024, F-59651 Villeneuve Dascq, France

来源：

SCRIPTA MATERIALIA | 2010年 / 62卷 / 10期

关键词：

Ductility; Thin films; Aluminium; Strain hardening; STRAIN-RATE SENSITIVITY;

D O I：

10.1016/j.scriptamat.2010.01.048

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ductility, defined as the strain at the onset of necking, has been characterized in thin Al films using an on-chip, internal stress actuated, microtensile testing setup. In the smallest specimens, the ductility is equal to 0.08 and 0.27 for 200 and 375 nm thick films, respectively, while the average strain-hardening exponents are, respectively, equal to 0.11 and 0.23. In addition to the thickness effect, ductility decreases with increasing specimen size due to imperfection sensitivity, involving a size-dependent statistical behaviour. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

引用

收藏

页码：742 / 745

页数：4

相关论文

共 23 条

[1] Stretchable helical gold conductor on silicone rubber microwire [J].

Befahy, S. ;

Yunus, S. ;

Pardoen, T. ;

Bertrand, P. ;

Troosters, M. .

APPLIED PHYSICS LETTERS, 2007, 91 (14)

[2] Internal stress relaxation based method for elastic stiffness characterization of very thin films [J].

Boe, A. ;

Safi, A. ;

Coulombier, M. ;

Pardoen, T. ;

Raskin, J-P. .

THIN SOLID FILMS, 2009, 518 (01) :260-264

[3] Structure-property optimization of ultrafine-grained dual-phase steels using a micro structure-based strain hardening model [J].

Delince, M. ;

Brechet, Y. ;

Embury, J. D. ;

Geers, M. G. D. ;

Jacques, P. J. ;

Pardoen, T. .

ACTA MATERIALIA, 2007, 55 (07) :2337-2350

[4] Plasticity size effects in free-standing submicron polycrystalline FCC films subjected to pure tension [J].

Espinosa, HD ;

Prorok, BC ;

Peng, B .

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2004, 52 (03) :667-689

[5] THE THERMOMECHANICAL INTEGRITY OF THIN-FILMS AND MULTILAYERS [J].

EVANS, AG ;

HUTCHINSON, JW .

ACTA METALLURGICA ET MATERIALIA, 1995, 43 (07) :2507-2530

[6] Size effects in miniaturized polycrystalline FCC samples: Strengthening versus weakening [J].

Geers, M. G. D. ;

Brekelmans, W. A. M. ;

Janssen, P. J. M. .

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2006, 43 (24) :7304-7321

[7] Increased strain rate sensitivity due to stress-coupled grain growth in nanocrystalline Al [J].

Gianola, D. S. ;

Warner, D. H. ;

Molinari, J. F. ;

Hemker, K. J. .

SCRIPTA MATERIALIA, 2006, 55 (07) :649-652

[8] New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films [J].

Gravier, Sebastien ;

Coulombier, Michael ;

Safi, Asmahan ;

Andre, Nicolas ;

Boe, Alexandre ;

Raskin, Jean-Pierre ;

Pardoen, Thomas .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2009, 18 (03) :555-569

[9]

Guckel H., 1992, Journal of Micromechanics and Microengineering, V2, P86, DOI 10.1088/0960-1317/2/2/004

[10] Strain gradient effect in nanoscale thin films [J].

Haque, MA ;

Saif, MTA .

ACTA MATERIALIA, 2003, 51 (11) :3053-3061