Deposition of Ti-B-N (single and multilayer) and Zr-B-N coatings by chemical vapor deposition techniques on cutting tools

被引:75
作者
Holzschuh, H [1 ]
机构
[1] Walter AG, R&D, D-72072 Tubingen, Germany
关键词
CVD; wear resistant coatings; TiBN; TiN; TiB2; ZrBN; ZrN; vickers hardness; crystallization; cutting tests;
D O I
10.1016/j.tsf.2004.08.077
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Coatings in the systems Ti-B-N and Zr-B-N were investigated because of their high potential in metal cutting. Therefore TiN, TiB2, TiBN, multilayers like [TiN-TiB2](x) or [TiN-TiBN](x) (x=3-100), ZrN and ZrBN coatings were deposited on cemented carbides using chemical vapor deposition (CVD). When keeping the boron content larger than 5 wt.% TiBN, coatings resulted in mixtures of TiN and TiB2. The TiN/TiB2 ratio, microstructure, hardness and wear resistance of the coatings were controlled by varying deposition temperatures and gas flows in the CVD process. Compared to TiN and TiB2 coatings, deposition rates in TiBN coatings became noticeably higher. TiBN coatings exhibited high hardness (HV 3500-5000) at moderate deposition temperatures (700-900 degreesC). Deposition temperatures below 900 C successfully suppressed boron diffusion and formation of a CoWB phase on the surface of the cemented carbide tool. Due to the moderate deposition temperatures, TiBN coatings showed very good adhesion. Boron diffusion was responsible for poor adhesion in TiB2 coatings. For milling tests TiN, TiB2, TiBN, multilayer coatings like [TiN-TiB2](x) or [TiN-TiBN](x) with a TiB2 content of 10-95%, ZrN and ZrBN were investigated. All TiBN coatings showed good wear resistance against abrasion. At a certain level of the TiN/TiB2 ratio, the TiBN coatings suppressed thermal cracks. Although the Zr-B-N and Ti-B-N systems seemed to be very similar, results showed differences in deposition chemistry and properties. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:92 / 98
页数:7
相关论文
共 11 条
[1]   Characterization of Ti-based nanocrystalline ternary nitride films [J].
Aouadi, SM ;
Chladek, JA ;
Namavar, F ;
Finnegan, N ;
Rohde, SL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (05) :1967-1973
[2]   Characterization of TiBN films grown by ion beam assisted deposition [J].
Aouadi, SM ;
Namavar, F ;
Gorishnyy, TZ ;
Rohde, SL .
SURFACE & COATINGS TECHNOLOGY, 2002, 160 (2-3) :145-151
[3]   STRUCTURE AND PROPERTIES OF TI-B-N COATINGS [J].
GISSLER, W .
SURFACE & COATINGS TECHNOLOGY, 1994, 68 :556-563
[4]   TITANIUM BORON-NITRIDE COATINGS OF VERY HIGH HARDNESS [J].
HAMMER, P ;
STEINER, A ;
VILLA, R ;
BAKER, M ;
GIBSON, PN ;
HAUPT, J ;
GISSLER, W .
SURFACE & COATINGS TECHNOLOGY, 1994, 68 :194-198
[5]   Chemical-vapor deposition of wear resistant hard coatings in the Ti-B-C-N system: properties and metal-cutting tests [J].
Holzschuh, H .
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2002, 20 (02) :143-149
[6]   Deposition of Ti-B-N films by ICP assisted sputtering [J].
Jung, DH ;
Kim, H ;
Lee, GR ;
Park, B ;
Lee, JJ ;
Joo, JH .
SURFACE & COATINGS TECHNOLOGY, 2003, 174 :638-642
[7]   Duplex process applied for die-casting and forging tools [J].
Klimek, KS ;
Ahn, H ;
Seebach, I ;
Wang, M ;
Rie, KT .
SURFACE & COATINGS TECHNOLOGY, 2003, 174 :677-680
[8]   Deposition of hard films on hot-working steel dies for aluminium [J].
Müller, KB .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2002, 130 :432-437
[9]   STUDY OF SOME PROPERTIES OF TITANIUM BORONITRIDE USED FOR THE COATING OF CUTTING TOOLS [J].
PEYTAVY, JL ;
LEBUGLE, A ;
MONTEL, G .
WEAR, 1979, 52 (01) :89-94
[10]   Characterization of hard coatings by depth-sensing indentation measurements: indentor effects [J].
Rother, B ;
Kazmanli, KM .
SURFACE & COATINGS TECHNOLOGY, 1998, 99 (03) :311-318