Surface characterization and mechanical property of TiN/Ti-coated NiTi alloy by PIIID

被引：51

作者：

Cheng, Y. ^{[1
]}

Zheng, Y. F. ^{[1
]}

机构：

[1] Peking Univ, Coll Engn, Dept Advf Mat & Nanotechnol, Beijing 100871, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2007年 / 201卷 / 15期

关键词：

TiN film; NiTi alloy; plasma immersion ion implantation and deposition;

D O I：

10.1016/j.surfcoat.2006.09.055

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A hard and adherent TiN/Ti thin film of approximately 3 gm in thickness was deposited on the surface of Ti-50.6 at.% Ni alloy by the PIIID technique. The surface composition and chemical state of the coated samples were evaluated by XPS. The XPS results indicate that titanium oxide and titanium oxynitride were present on the TiN surface. The spectra of Ti 2p, N 1s, O 1s and C 1s electrons before and after the film being sputter etched were also discussed. Scanning electron microscopy (SEM) and energy disperse spectroscopy (EDS) analyses demonstrate that an interfacial layer, containing Ti, N and Ni, was formed at the interface between the TiN and Ti coatings. Sliding wear tests show that the TiN coating significantly reduces the friction coefficient and improves wear resistance of the NiTi alloy. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：6869 / 6873

页数：5

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