Atom configuration study of delta-doped Er in InP by fluorescence EXAFS

被引：20

作者：

Ofuchi, H

Tsuchiya, J

Matsubara, N

Tabuchi, M

Fujiwara, Y

Takeda, Y

机构：

[1] Dept. of Mat. Sci. and Engineering, School of Engineering, Nagoya University, Furo-Cho, Chikusa-Ku

来源：

APPLIED SURFACE SCIENCE | 1997年 / 117卷

关键词：

erbium; delta-doping; InP; OMVPE; EXAFS;

D O I：

10.1016/S0169-4332(97)80182-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We have investigated OMVPE-grown InP delta-doped with Er by EXAFS. The EXAFS measurement revealed that Er atoms which were delta-doped in InP by exposing to Er source for 15 min at 530 degrees C (15 min Er-exposed sample) formed NaCl-structure ErP whose Er-P bond length was 2.80 +/- 0.03 Angstrom. The 10 min Er-exposed sample at 580 degrees C showed a spectrum similar to cubic bixbyite structure Er2O3 which was not observed in uniformly Er-doped InP samples. For the 40 min Er-exposed sample at 530 degrees C, Er atoms formed both ErP and Er2O3.

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收藏

页码：781 / 784

页数：4

相关论文

共 12 条

[1] LOCAL-STRUCTURE OF 1.54-MU-M-LUMINESCENCE ER-3+ IMPLANTED IN SI [J].

ADLER, DL ;

JACOBSON, DC ;

EAGLESHAM, DJ ;

MARCUS, MA ;

BENTON, JL ;

POATE, JM ;

CITRIN, PH .

APPLIED PHYSICS LETTERS, 1992, 61 (18) :2181-2183

[2] DRASTIC EFFECTS OF HYDROGEN FLOW-RATE ON GROWTH-CHARACTERISTICS AND ELECTRICAL OPTICAL-PROPERTIES OF INP GROWN BY ORGANOMETALLIC VAPOR-PHASE EPITAXY WITH TMIN AND TBP [J].

FUJIWARA, Y ;

FURUTA, S ;

MAKITA, K ;

ITO, Y ;

NONOGAKI, Y ;

TAKEDA, Y .

JOURNAL OF CRYSTAL GROWTH, 1995, 146 (1-4) :544-548

[3] Erbium doping to P-based III-V semiconductors by OMVPE with TBP as a non-toxic P source [J].

Fujiwara, Y ;

Ito, Y ;

Nonogaki, Y ;

Matsubara, N ;

Fujita, K ;

Takeda, Y .

ICDS-18 - PROCEEDINGS OF THE 18TH INTERNATIONAL CONFERENCE ON DEFECTS IN SEMICONDUCTORS, PTS 1-4, 1995, 196- :621-625

[4] FLUORESCENCE DETECTION OF EXAFS - SENSITIVITY ENHANCEMENT FOR DILUTE SPECIES AND THIN-FILMS [J].

JAKLEVIC, J ;

KIRBY, JA ;

KLEIN, MP ;

ROBERTSON, AS ;

BROWN, GS ;

EISENBERGER, P .

SOLID STATE COMMUNICATIONS, 1977, 23 (09) :679-682

[5] NARROW-LINEWIDTH FIBER LASER OPERATING AT 1.55-MU-M [J].

JAUNCEY, IM ;

REEKIE, L ;

MEARS, RJ ;

ROWE, CJ .

OPTICS LETTERS, 1987, 12 (03) :164-165

[6] MAGNETIC STRUCTURES OF ER2O3 AND YB2O3 [J].

MOON, RM ;

KOEHLER, WC ;

CHILD, HR ;

RAUBENHEIMER, LJ .

PHYSICAL REVIEW, 1968, 176 (02) :722-+

[7] GROWTH AND STRUCTURAL CHARACTERIZATION OF MOLECULAR-BEAM EPITAXIAL ERBIUM-DOPED GAAS [J].

POOLE, I ;

SINGER, KE ;

PEAKER, AR ;

WRIGHT, AC .

JOURNAL OF CRYSTAL GROWTH, 1992, 121 (1-2) :121-131

[8] THEORETICAL X-RAY ABSORPTION FINE-STRUCTURE STANDARDS [J].

REHR, JJ ;

DELEON, JM ;

ZABINSKY, SI ;

ALBERS, RC .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1991, 113 (14) :5135-5140

[9]

TABUCHI M, IN PRESS

[10] ER LUMINESCENCE-CENTERS IN GAAS GROWN BY MIGRATION-ENHANCED EPITAXY [J].

TAGUCHI, A ;

KAWASHIMA, M ;

TAKAHEI, K ;

HORIKOSHI, Y .

APPLIED PHYSICS LETTERS, 1993, 63 (08) :1074-1076