A micromachined magnetic-field sensor based on an electron tunneling displacement transducer

被引：28

作者：

DiLella, D

Whitman, LJ

Colton, RJ

Kenny, TW

Kaiser, WJ

Vote, EC

Podosek, JA

Miller, LM

机构：

[1] USN, Res Lab, Washington, DC 20375 USA

[2] CALTECH, Jet Prop Lab, Ctr Space Microelect Technol, Pasadena, CA 91109 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 86卷 / 1-2期

基金：

美国国家航空航天局;

关键词：

magnetic-field sensor; tunnel sensor; MEMS;

D O I：

10.1016/S0924-4247(00)00303-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe a micromachined magnetic-field sensor that is based on an electron tunneling transducer. This tunnel sensor is small, very sensitive, operates at ambient temperature and requires very little power. The measured resolution of the sensor is 0.3 nT/root Hz at 1 Hz, The limiting resolution, calculated based on fundamental noise sources, is 0.002 nT/root Hz at 1 Hz. The dominant source of the observed noise in the present device is low frequency air pressure fluctuations. (C) 2000 Published by Elsevier Science B.V.

引用

收藏

页码：8 / 20

页数：13

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