Time-resolved photography of the plasma-plume and ejected particles in laser ablation of polytetrafluoroethylene

被引:24
作者
Huber, N [1 ]
Gruber, J [1 ]
Arnold, N [1 ]
Heitz, J [1 ]
Bäuerle, D [1 ]
机构
[1] Johannes Kepler Univ, A-4040 Linz, Austria
来源
EUROPHYSICS LETTERS | 2000年 / 51卷 / 06期
关键词
D O I
10.1209/epl/i2000-00391-2
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
KrF-excimer laser ablation of sintered-powder PTFE targets is successfully used for the deposition of high-quality thin films. The mechanism is based on the high extinction of the pressed-ponder targets which causes more efficient dissipation of the incident laser-light energy. As a result, a strong ly forward-directed jet of PTFE particles is generated. This jet is investigated by means of a gated ICCD-camera. While the expansion of the visible plume starts with the laser pulse and lasts for about 10 mu s, the particle jet can be observed within a time interval between about 5 mu s and more than 100 mu s after the laser guise.
引用
收藏
页码:674 / 678
页数:5
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