Optical properties of PbZrxTi1-xO3 on platinized silicon by infrared spectroscopic ellipsometry

A method of analyzing infrared spectroscopic ellipsometry (IRSE) measurement data is proposed for lead zirconate titanate PbZrxTi1-xO3 (PZT) thin films grown on Pt/Ti/SiO2/Si substrates with x=0.3 and 0.5. The IRSE data measured at an angle of incidence 75 degrees for x=0.3 and 70 degrees for x=0.5 are fitted by a dielectric function formula. The refractive index and extinction coefficient of PZT with x=0.3 and 0.5 are determined in the spectral range of 2.5-12.5 mu m. As the wavelength increases, the refractive index decreases, on the contrary, the extinction coefficient increases. The absorption coefficient for x=0.5 is greater than that for x=0.3 by a factor of 1.5. The effective static ionic charges have also been derived, which are smaller than they would be in a purely ionic material for PZT thin films. (C) 2000 American Institute of Physics. [S0003-6951(00)01226-2].