Fabrication and ferroelectric properties of highly dense lead-free piezoelectric (K0.5Na0.5)NbO3 thick films by aerosol deposition

被引：133

作者：

Ryu, Jungho ^{[1
]}

Choi, Jong-Jin ^{[1
]}

Hahn, Byung-Dong ^{[1
]}

Park, Dong-Soo ^{[1
]}

Yoon, Woon-Ha ^{[1
]}

Kim, Ki-Hoon ^{[1
]}

机构：

[1] Korea Inst Machinery & Mat, Dept Future Technol, Chang Won 641831, Kyungnam, South Korea

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 15期

关键词：

D O I：

10.1063/1.2720751

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lead-free piezoelectric thick films of (K0.5Na0.5)NbO3 were fabricated by aerosol-deposition method. The thickness of KNN film was 7.1 mu m and fully dense films were obtained. The dielectric constants epsilon(T)(3)/epsilon(0) of the as-deposited and annealed films at 1 kHz were 116 and 545, respectively, which are higher than any previously reported values for lead-free piezoelectric thin/thick films, either without or with heat treatment. The ferroelectric properties were improved after annealing and the maximum values of P-r=8.1 mu C/cm(3) and E-c=100 kV/cm were achieved. These values are markedly superior to those of sintered KNN ceramic counterparts. (c) 2007 American Institute of Physics.

引用

页数：3

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