Structural and electrical properties of DC sputtered molybdenum films

被引：60

作者：

Gordillo, G ^{[1
]}

Grizalez, M ^{[1
]}

Hernandez, LC ^{[1
]}

机构：

[1] Univ Nacl Colombia, Dept Fis, Lab Celdas Solares, Bogota, Colombia

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1998年 / 51卷 / 3-4期

关键词：

molybdenum films; low-resistivity;

D O I：

10.1016/S0927-0248(97)00236-5

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

A method is described for the fabrication of low-resistivity molybdenum films on soda-lime glass substrates. Films have been deposited using a DC magnetron sputtering system with a S-gun configuration, and have been characterized through X-ray diffraction, electrical conductivity, and Hall mobility measurements. The influence of the deposition parameters on both the resistivity of the Mo and on the contact resistivity of the Mo/CuInSe2/Mo structure has been studied. Values of resistivity ranging from 1.2 x 10(-5) to 36 x 10(-5) Omega cm and of contact resistivity ranging from 0.025 to 0.15 Omega cm(2) were found. (C) 1988 Elsevier Science B.V. All rights reserved.

引用

页码：327 / 337

页数：11

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