Diamond switch using new thermal actuation principle

被引：24

作者：

Schmid, P ^{[1
]}

Hernandez-Guillen, FJ ^{[1
]}

Kohn, E ^{[1
]}

机构：

[1] Univ Ulm, D-89081 Ulm, Germany

来源：

关键词：

diamond film; thermal properties; actuators; device modeling;

D O I：

10.1016/S0925-9635(02)00399-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, a thermally actuated diamond microswitch is presented. To realize such switches, the classical bi-metal principle has been newly applied to diamond beams. Details on the device structure and its technological realization as well as measurement results on the fabricated switches will be given. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：418 / 421

页数：4