Achieving 63pm resolution in scanning transmission electron microscope with spherical aberration corrector

被引：50

作者：

Sawada, Hidetaka

Hosokawai, Fumio

Kaneyama, Toshikatsu

Ishizawa, Toshihiro

Terao, Mitsuhisa

Kawazoe, Muneyuki

Sannomiya, Takumi

Tomita, Takeshi

Kondo, Yukihito

Tanaka, Takayuki

Oshima, Yoshifumi

Tanishiro, Yasumasa

Yamamoto, Naoki

Takayanagi, Kunio

机构：

[1] Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan

[2] JEOL Ltd, Akishima, Tokyo 1968558, Japan

[3] Tokyo Inst Technol, Meguro Ku, Tokyo 1528551, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2007年 / 46卷 / 20-24期

关键词：

aberration correction; electron microscope; high resolution; dark field image;

D O I：

10.1143/JJAP.46.L568

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The performance of a newly developed high-resolution 300 kV microscope equipped with a spherical aberration corrector for probe-forming systems is reported. This microscope gave the highest resolution for the distance between atomic columns, as determined by a high-angle annular dark field imaging method using a GaN[211] crystalline specimen, where the distance between the neighboring columns of Ga was 63pm.

引用

页码：L568 / L570

页数：3

共 17 条

[1] Direct observation of a local thermal vibration anomaly in a quasicrystal [J].