Synthesis of high purity silicon nanoparticles in a low pressure microwave reactor

The formation of pure single crystalline silicon nanoparticles by microwave induced decomposition of silane in a low pressure flow reactor is reported. The morphology and crystal structure of the particles are characterized in situ by particle mass spectrometry (PMS) and ex situ by means of X-ray diffraction, high resolution transmission electron microscopy, electron energy loss spectroscopy, and infrared spectroscopy. The preparation method allows for the adjustment of the mean particle diameter in the range 6 nm less than or equal to d(PM) less than or equal to 11 nm by controlling the precursor concentration, gas pressure, and microwave power. Spectroscopic investigations reveal that the particles are single crystal silicon. The potential on n- or p-type doping is in progress.