Electric fields in a sheath near a metal-dielectric interface

被引:41
作者
Barnat, EV [1 ]
Hebner, GA [1 ]
机构
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
基金
美国能源部;
关键词
D O I
10.1063/1.1766075
中图分类号
O59 [应用物理学];
学科分类号
摘要
Spatially resolved electric fields in the sheath region near a metal-dielectric junction were measured in a radio-frequency-driven argon plasma. The fields were determined by observing the Stark shifted transitions to the 13d[3/2](1) Rydberg state by laser-induced fluorescence-dip spectroscopy. Calibration of the Stark shifts for the 13d[3/2](1) Rydberg state were experimentally obtained in a separate apparatus. Maps of the electric fields illustrate that the structure of the sheath formed around the junction depended on both the surface material and on the configuration of the surface. (C) 2004 American Institute of Physics.
引用
收藏
页码:3393 / 3395
页数:3
相关论文
共 20 条
[1]  
BARNAT EV, UNPUB
[2]  
BASHKIN S, 1978, ATOMIC ENERGY LEVEL, V2, P173
[3]   Electric field measurements in an argon glow discharge using laser spectroscopy [J].
Choi, YW ;
Bowden, MD ;
Muraoka, K .
APPLIED PHYSICS LETTERS, 1996, 69 (10) :1361-1363
[4]   Space and time resolved electric field measurements in helium and hydrogen RF-discharges [J].
Czarnetzki, U ;
Luggenhölscher, D ;
Döbele, HF .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (02) :230-248
[5]   Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge [J].
Czarnetzki, U ;
Hebner, GA ;
Luggenhölscher, D ;
Döbele, HF ;
Riley, ME .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1999, 27 (01) :70-71
[6]   Measurement method for electric fields based on Stark spectroscopy of argon atoms [J].
Gavrilenko, VP ;
Kim, HJ ;
Ikutake, T ;
Kim, JB ;
Choi, YW ;
Bowden, MD ;
Muraoka, K .
PHYSICAL REVIEW E, 2000, 62 (05) :7201-7208
[7]   DYNAMIC-MODEL OF THE ELECTRODE SHEATHS IN SYMMETRICALLY DRIVEN RF DISCHARGES [J].
GODYAK, VA ;
STERNBERG, N .
PHYSICAL REVIEW A, 1990, 42 (04) :2299-2312
[8]   GLOW-DISCHARGE SHEATH ELECTRIC-FIELDS - NEGATIVE-ION, POWER, AND FREQUENCY-EFFECTS [J].
GOTTSCHO, RA .
PHYSICAL REVIEW A, 1987, 36 (05) :2233-2242
[9]   ELECTRIC-FIELDS IN HIGH-FREQUENCY PARALLEL-PLATE HELIUM DISCHARGES [J].
HEBNER, GA ;
GREENBERG, KE ;
RILEY, ME .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (07) :4036-4044
[10]   Simulation of a two-dimensional sheath over a flat insulator-conductor interface on a radio-frequency biased electrode in a high-density plasma [J].
Kim, D ;
Economou, DJ .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (07) :3311-3318