Properties of high-density amorphous carbon films deposited by laser ablation

被引：6

作者：

Kovách, G

Csorbai, H

Radnóczi, GZ

Vida, G

Pászti, Z

Petö, G

Karacs, A

机构：

[1] MFA, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary

[2] Budapest Univ Technol & Econ, Dept Atom Phys, H-1111 Budapest, Hungary

来源：

MATERIALS SCIENCE, TESTING AND INFORMATICS | 2003年 / 414-4卷

关键词：

pulsed laser deposition (PLD); diamond-like carbon (DLC); graphite-like carbon (GLC); chemically protective layer;

D O I：

10.4028/www.scientific.net/MSF.414-415.127

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The properties of carbon films deposited by high intensity pulsed Nd:Glass laser are reported. Different measurements like TEM, SIMS, EELS, XPS and AFM showed the formation of a high-density amorphous carbon layer with good protection against chemically aggressive alkaline solutions. We demonstrated that instead of excimer lasers, Nd-based solid state lasers can be used successfully for preparation of high quality amorphous carbon films.

引用

收藏

页码：127 / 132

页数：6

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