Freestanding individual single-walled carbon nanotube synthesis based on plasma sheath effects

被引:23
作者
Kato, T [1 ]
Jeong, GH
Hirata, T
Hatakeyama, R
Tohji, K
机构
[1] Tohoku Univ, Dept Elect Engn, Sendai, Miyagi 9808579, Japan
[2] Tohoku Univ, Grad Sch Environm Studies, Sendai, Miyagi 9808579, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2004年 / 43卷 / 10A期
关键词
single-walled carbon nanotube; plasma-enhanced chemical vapor deposition; zeolite; freestanding; low-temperature synthesis;
D O I
10.1143/JJAP.43.L1278
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the successful synthesis of vertically aligned single-walled carbon nanotubes (SWNTs) at relatively low temperatures below 650degreesC using very short-time (30 s) plasma-enhanced chemical vapor deposition (PECVD) process. Based on the detailed transmission electron microscopy observation, it is revealed that all of the short-length SWNTs growing from catalysts which are fixed by zeolites form individual shapes. According to the comparison between general PECVD and our PECVD, several requirements for the SWNT growth under PECVD are claimed.
引用
收藏
页码:L1278 / L1280
页数:3
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