Dynamic NBTI of p-MOS transistors and its impact on MOSFET scaling

被引:122
作者
Chen, G [1 ]
Li, MF
Ang, CH
Zheng, JZ
Kwong, DL
机构
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Silicon Nano Device Lab, Singapore 119260, Singapore
[2] Natl Univ Singapore, Dept Elect & Comp Engn, CICFAR, Singapore 119260, Singapore
[3] Chartered Semicond Mfg Ltd, Singapore 738406, Singapore
[4] Univ Texas, Dept Elect & Comp Engn, Austin, TX 78741 USA
关键词
annealing; CMOSFETs; negative bias temperature instability (NBTI); semiconductor-insulator interfaces; ultra-thin gate oxide;
D O I
10.1109/LED.2002.805750
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For the first time, a dynamic negative bias temperature instability (DNBTI) effect in p-MOSFETs with ultrathin gate oxide (1.3 nm) has been studied. The interface traps generated under NBTI stressing corresponding to p-MOSFET operating condition of the "high" output state in a CMOS inverter, are subsequently passivated when the gate to drain voltage switches to positive corresponding to the p-MOSFET operating condition of the "low" output state in the CMOS inverter. Consequently, this DNBTI effect significantly prolongs the lifetime of p-MOSFETs operating in a digital circuit, and the conventional static NBTI (SNBTI) measurement underestimates the p-MOSFET lifetime. A physical model is presented to explain the DNBTI. This finding has significant impact on future scaling of CMOS devices.
引用
收藏
页码:734 / 736
页数:3
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