The thermal decomposition process of barium strontium titanate (BST) xerogel precursors has been analyzed using thermogravimetric analysis, Differential thermal analysis and X-ray diffraction. The results indicate that the precursors are amorphous in nature when annealed below 520degreesC, and perovskite BST grains crystallize at 620degreesC via a solid-state reaction between (Ba,Sr)CO3 and TiO2. It is revealed that the intermediate phase suppresses the crystallization of perovskite BST grains in films, and results in higher anneal temperature. To minimize the intermediate phase, the first three layers are crystallized prior to the deposition of subsequent layers, and 340-nm-thick perovskite BST films have been fabricated at a process temperature of 625degreesC. The low process temperature results in a fine-grained structure in films, producing films that exhibit low dielectric constant and low tunability accordingly. (C) 2003 Elsevier Science B.V. All rights reserved.
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Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Padmini, P
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Taylor, TR
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机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Taylor, TR
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Lefevre, MJ
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机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Lefevre, MJ
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Nagra, AS
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机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Nagra, AS
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York, RA
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机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
York, RA
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Speck, JS
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机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
机构:
Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Padmini, P
;
Taylor, TR
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h-index: 0
机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Taylor, TR
;
Lefevre, MJ
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h-index: 0
机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Lefevre, MJ
;
Nagra, AS
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
Nagra, AS
;
York, RA
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
York, RA
;
Speck, JS
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Coll Engn, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA