Structural and thermal analyses on phase evolution of sol-gel (Ba,Sr)TiO3 thin films

被引:28
作者
Chen, XF
Lu, WQ
Zhu, WG
Lim, SY
Akbar, SA
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Ctr Microelect, Singapore, Singapore
[2] DSO Natl Labs, Singapore, Singapore
[3] Ohio State Univ, Ctr Ind Sensors & Measurements, Columbus, OH 43210 USA
关键词
sol-gel; barium strontium titanate thin film; structural evolution;
D O I
10.1016/S0257-8972(02)00897-6
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The thermal decomposition process of barium strontium titanate (BST) xerogel precursors has been analyzed using thermogravimetric analysis, Differential thermal analysis and X-ray diffraction. The results indicate that the precursors are amorphous in nature when annealed below 520degreesC, and perovskite BST grains crystallize at 620degreesC via a solid-state reaction between (Ba,Sr)CO3 and TiO2. It is revealed that the intermediate phase suppresses the crystallization of perovskite BST grains in films, and results in higher anneal temperature. To minimize the intermediate phase, the first three layers are crystallized prior to the deposition of subsequent layers, and 340-nm-thick perovskite BST films have been fabricated at a process temperature of 625degreesC. The low process temperature results in a fine-grained structure in films, producing films that exhibit low dielectric constant and low tunability accordingly. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:203 / 206
页数:4
相关论文
共 10 条
[1]   SYNTHESIS AND PROCESSING OF BARIUM-TITANATE CERAMICS FROM ALKOXIDE SOLUTIONS AND MONOLITHIC GELS [J].
FREY, MH ;
PAYNE, DA .
CHEMISTRY OF MATERIALS, 1995, 7 (01) :123-129
[2]   Microstructure and dielectric properties of Ba1-xSrxTiO3 films grown on LaAlO3 substrates [J].
Gim, Y ;
Hudson, T ;
Fan, Y ;
Kwon, C ;
Findikoglu, AT ;
Gibbons, BJ ;
Park, BH ;
Jia, QX .
APPLIED PHYSICS LETTERS, 2000, 77 (08) :1200-1202
[3]   Crystallization of sol-gel-derived barium strontium titanate thin films [J].
Gust, MC ;
Momoda, LA ;
Evans, ND ;
Mecartney, ML .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2001, 84 (05) :1087-1092
[4]   THERMAL-DECOMPOSITION OF (BATI) CITRATES INTO BARIUM-TITANATE [J].
HENNINGS, D ;
MAYR, W .
JOURNAL OF SOLID STATE CHEMISTRY, 1978, 26 (04) :329-338
[5]   METAL-ORGANIC RESIN DERIVED BARIUM-TITANATE .1. FORMATION OF BARIUM TITANIUM OXYCARBONATE INTERMEDIATE [J].
KUMAR, S ;
MESSING, GL ;
WHITE, WB .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1993, 76 (03) :617-624
[6]   SOL-GEL PROCESSED BATIO3 - STRUCTURAL EVOLUTION FROM THE GEL TO THE CRYSTALLINE POWDER [J].
MOSSET, A ;
GAUTIERLUNEAU, I ;
GALY, J ;
STREHLOW, P ;
SCHMIDT, H .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 100 (1-3) :339-344
[7]  
MURTHY HSG, 1975, J INORG NUCL CHEM, V37, P891
[8]   Realization of high tunability barium strontium titanate thin films by rf magnetron sputtering [J].
Padmini, P ;
Taylor, TR ;
Lefevre, MJ ;
Nagra, AS ;
York, RA ;
Speck, JS .
APPLIED PHYSICS LETTERS, 1999, 75 (20) :3186-3188
[9]   KINETICS OF BATIO3 AND PBTIO3 FORMATION FROM METALLOORGANIC PRECURSORS [J].
SHAIKH, AS ;
VEST, GM .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1986, 69 (09) :682-688
[10]   Ferroelectricity in thin films:: The dielectric response of fiber-textured (BaxSr1-x)Ti1+yO3+z thin films grown by chemical vapor deposition [J].
Streiffer, SK ;
Basceri, C ;
Parker, CB ;
Lash, SE ;
Kingon, AI .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (08) :4565-4575