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Material properties and the influence of metallic catalysts at the surface of highly dense SnO2 films

被引：66
作者：
Wöllenstein, J
Böttner, H
Jaegle, M
Becker, WJ
Wagner, E
机构：
[1] Fraunhofer Inst Phys Measurement Tech, D-79110 Freiburg, Germany
[2] Univ Kassel, Dept Elect Engn, D-34121 Kassel, Germany
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 70卷 / 1-3期
关键词：
SnO2; thin film; gas sensor; surface catalyst; platinum;
D O I：
10.1016/S0925-4005(00)00569-4
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
We present an approach to optimize the specific response to gases by using specially prepared nanosized platinum on highly dense sputtered polycrystalline SnO2. Structural and morphological analyses of the SnO2 and platinum thin films were performed. Gas measurements were carried out with single chip thin-film SnO2 sensor arrays on silicon substrates. Pt nanoclusters covering the sensitive layer significantly affect the O-3, CO and NO2 sensitivities and the corresponding dynamic response. (C) 2000 Elsevier Science B.V, All rights reserved.
引用
收藏
页码：196 / 202
页数：7
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