CLASSICAL AND NOVEL TECHNIQUES FOR THE PREPARATION OF SNO2 THIN-FILM GAS SENSORS

It is well known that tin oxide is considered as one of the most important and studied materials for the fabrication of semiconductor gas sensors. Moreover, thin-film techniques seem the most suitable for the production of smart gas sensors on silicon substrates using microelectronic technologies. This paper presents a review of the different thin-film techniques for growing tin oxide gas sensors. A new deposition method with the acronym RGTO (rheotaxial growth and thermal oxidation) is also described in detail with regard to the preparation parameters. Finally, the structural and morphological characteristics of RGTO thin films and their electrical response to various gases are considered.