Study of preferred orientation of zinc oxide films on the 64° LiNbO3 substrates and their, applications as liquid sensors

被引：8

作者：

Jian, SJ

Chu, SY ^{[1
]}

Huang, TY

Water, W

机构：

[1] Natl Cheng Kung Univ, Dept Elect Engn, Tainan, Taiwan

[2] Shu Zen Coll Med & Management, Dept Nursing, Kaohsiung, Taiwan

[3] Tung Nan Inst Technol, Dept Elect Engn, Taipei, Taiwan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2004年 / 22卷 / 06期

关键词：

D O I：

10.1116/1.1809125

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The preferred (002) orientation of zinc oxide (ZnO) films has been grown and demonstrated on 64degrees LiNbO3 substrates using a rf magnetron sputtering system. The film orientations and crystallinity are strongly dependent on the rf power, total chamber pressure, ratio of argon to oxygen, and substrate temperature. We investigated the crystalline structure of the films by x-ray diffraction and scanning electron microscopy. Highly oriented (002) films were obtained under a total chamber pressure of 1.33 Pa, containing 40% oxygen and 60% argon, and a substrate temperature around 120degreesC. Love-wave devices based on this structure (ZnO/IDTs/64degrees LiNbO3) are presented. (C) 2004 American Vacuum Society.

引用

页码：2424 / 2430

页数：7

共 27 条

[1] An investigation of the dependence of ZnO film on the sensitivity of love mode sensor in ZnO/quartz structure [J].