Fabrication of structurally chiral SC2O3 films and observation of Bragg resonance at deep UV wavelengths

被引：1

作者：

De Silvaa, Lakshman ^{[1
]}

Hodgkinson, Ian ^{[1
]}

机构：

[1] Univ Otago, Dept Phys, Dunedin 9001, New Zealand

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2007年 / 25卷 / 04期

关键词：

D O I：

10.1116/1.2432347

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The authors report serial bideposition of structurally chiral films for deep ultraviolet (DUV) wavelengths. Scanning electron micrographs confirm that the Sc2O3 films have a twisted columnar nanostructure similar to a double-start screw. Observation of circular Bragg resonances in reflection and transmission at 230 nm indicates a dielectric pitch of 65 nm, an average refractive index of 1.75, and local in-plane linear birefringence of 0.05. Possible applications of DUV chiral media include novel thin film polarizing devices for use in the DUV spectral region, where conventional designs are currently severely constrained by material properties. (c) 2007 American Vacuum Society.

引用

页码：1118 / 1122

页数：5

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