The structures for electrostatic servo capacitive vacuum sensors

被引：13

作者：

Wang, YL ^{[1
]}

Esashi, M

机构：

[1] Zhejiang Univ, Dept Informat & Electron Engn, State Key Lab Silicon Mat, Hangzhou 310027, Peoples R China

[2] Tohoku Univ, Fac Engn, Sendai, Miyagi 98077, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期

关键词：

vacuum; sensors; servo;

D O I：

10.1016/S0924-4247(98)00037-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Two kinds of electrostatic servo capacitive vacuum sensors have been successfully fabricated using P+- silicon etch-stop and vacuum anodic-bonding techniques. In order to maintain the reference cavity at high vacuum, a non-evaporable getter (NEG) is used as a small vacuum pump. The dynamic range of the sensor can be extended by a servo system. The pressure responses of the sensors are good. The plot of servo voltage versus pressure is measured and the theoretical data agree with the experimental results. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：213 / 217

页数：5

共 5 条

[1]

Hatanaka K, 1995, 13 SENS S JAP, P37

[2] VACUUM PACKAGING FOR MICROSENSORS BY GLASS SILICON ANODIC BONDING [J].